Ibrahim Mitani, S. M. (2005) “Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation”, Malaysian Journal of Science, 24(1), p. 88. Available at: http://adum.um.edu.my/index.php/MJS/article/view/17173 (Accessed: 24 December 2024).