Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation

Main Article Content

Sufian Mousa Ibrahim Mitani

Abstract

Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation

Downloads

Download data is not yet available.

Article Details

How to Cite
Ibrahim Mitani, S. M. (2005). Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation. Malaysian Journal of Science, 24(1), 88. Retrieved from http://adum.um.edu.my/index.php/MJS/article/view/17173
Section
Short Communication